The impact of area on BAW resonator performance and an approach to device miniaturization
Journal article, Peer reviewed
Accepted version
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http://hdl.handle.net/11250/2590471Utgivelsesdato
2018Metadata
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Sammendrag
The dependence of the performance of thin film bulk acoustic resonator (FBAR) and solidly mounted resonator (SMR), on their areas is studied with the aid of finite element method (FEM) software. Dual step frame method is applied for both types of the resonators in order to improve their quality factors at resonance and at antiresonance frequency when they are miniaturized. The important role of the material quality in promoting the benefit of this method is also emphasized in this study. The impact of area on BAW resonator performance and an approach to device miniaturization