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dc.contributor.authorNguyen, Ngoc
dc.contributor.authorJohannessen, Agne
dc.contributor.authorRooth, Stig
dc.contributor.authorHanke, Ulrik
dc.date.accessioned2019-03-18T12:09:11Z
dc.date.available2019-03-18T12:09:11Z
dc.date.created2019-02-27T16:00:05Z
dc.date.issued2018
dc.identifier.citationUltrasonics. 2018.nb_NO
dc.identifier.issn0041-624X
dc.identifier.urihttp://hdl.handle.net/11250/2590471
dc.description.abstractThe dependence of the performance of thin film bulk acoustic resonator (FBAR) and solidly mounted resonator (SMR), on their areas is studied with the aid of finite element method (FEM) software. Dual step frame method is applied for both types of the resonators in order to improve their quality factors at resonance and at antiresonance frequency when they are miniaturized. The important role of the material quality in promoting the benefit of this method is also emphasized in this study.nb_NO
dc.description.abstractThe impact of area on BAW resonator performance and an approach to device miniaturizationnb_NO
dc.language.isoengnb_NO
dc.titleThe impact of area on BAW resonator performance and an approach to device miniaturizationnb_NO
dc.typeJournal articlenb_NO
dc.typePeer reviewednb_NO
dc.description.versionacceptedVersionnb_NO
dc.source.pagenumber10nb_NO
dc.source.journalUltrasonicsnb_NO
dc.identifier.doi10.1016/j.ultras.2018.11.014
dc.identifier.cristin1681119
dc.relation.projectNotur/NorStore: NN9344Knb_NO
cristin.unitcode222,58,4,0
cristin.unitnameInstitutt for mikrosystemer
cristin.ispublishedtrue
cristin.fulltextpreprint
cristin.qualitycode1


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