dc.contributor.author | Lu, Pai | |
dc.contributor.author | Chen, Xuyuan | |
dc.contributor.author | Øhlckers, Per | |
dc.contributor.author | Halvorsen, Einar | |
dc.contributor.author | Hoffmann, Martin | |
dc.contributor.author | Müller, Lutz | |
dc.date.accessioned | 2022-03-28T11:27:28Z | |
dc.date.available | 2022-03-28T11:27:28Z | |
dc.date.created | 2022-01-30T16:56:56Z | |
dc.date.issued | 2021 | |
dc.identifier.citation | Lu, P., Chen, X., Ohlckers, P., Halvorsen, E., Hoffmann, M. & Müller, L. (2021). DRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chip. Journal of Physics: Conference Series, 1837(1), Artikkel 012005. | en_US |
dc.identifier.issn | 1742-6588 | |
dc.identifier.uri | https://hdl.handle.net/11250/2987964 | |
dc.description.abstract | Supercapacitor is a promising solution to storage of pulsed energy generated by MEMS energy harvesting systems, relying on its faster charging/discharging capability than secondary battery. To improve the energy density of on-chip supercapacitor which shows potential for integration with MEMS devices, in this paper we first present a successful electrode design for high specific energy pseudo-supercapacitors on the basis of deep reactive ion etched Si nanowire array supported nano-carbon matrix. Widely used pseudo-capacitive manganese oxide active material is facilely deposited into the conductive nano-carbon matrix by a chemical bath deposition. The derived electrode exhibits a remarkable capacitance increase (around 4.5x enhancement) compared with the nano-carbon matrix benefiting from the contribution of pseudo-capacitive manganese oxide. Assembled sandwich prototype on-chip supercapacitors with a symmetric configuration offer a high specific capacitance of 741.6 mF cm−2 when discharged at 1 mA cm−2, and the energy density can attain as high as 51.5 μWh cm−2. The achieved high specific energy makes such on-chip supercapacitors attractive in the field of energy collection when cooperated with micro-or nano-energy generators. | en_US |
dc.language.iso | eng | en_US |
dc.rights | Navngivelse 4.0 Internasjonal | * |
dc.rights.uri | http://creativecommons.org/licenses/by/4.0/deed.no | * |
dc.title | DRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chip | en_US |
dc.type | Peer reviewed | en_US |
dc.type | Journal article | en_US |
dc.description.version | publishedVersion | en_US |
dc.source.volume | 1837 | en_US |
dc.source.journal | Journal of Physics: Conference Series (JPCS) | en_US |
dc.identifier.doi | https://doi.org/10.1088/1742-6596/1837/1/012005 | |
dc.identifier.cristin | 1993728 | |
dc.source.articlenumber | 012005 | en_US |
cristin.ispublished | true | |
cristin.fulltext | original | |
cristin.qualitycode | 1 | |