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dc.contributor.authorLu, Pai
dc.contributor.authorChen, Xuyuan
dc.contributor.authorØhlckers, Per
dc.contributor.authorHalvorsen, Einar
dc.contributor.authorHoffmann, Martin
dc.contributor.authorMüller, Lutz
dc.identifier.citationLu, P., Chen, X., Ohlckers, P., Halvorsen, E., Hoffmann, M. & Müller, L. (2021). DRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chip. Journal of Physics: Conference Series, 1837(1), Artikkel 012005.en_US
dc.description.abstractSupercapacitor is a promising solution to storage of pulsed energy generated by MEMS energy harvesting systems, relying on its faster charging/discharging capability than secondary battery. To improve the energy density of on-chip supercapacitor which shows potential for integration with MEMS devices, in this paper we first present a successful electrode design for high specific energy pseudo-supercapacitors on the basis of deep reactive ion etched Si nanowire array supported nano-carbon matrix. Widely used pseudo-capacitive manganese oxide active material is facilely deposited into the conductive nano-carbon matrix by a chemical bath deposition. The derived electrode exhibits a remarkable capacitance increase (around 4.5x enhancement) compared with the nano-carbon matrix benefiting from the contribution of pseudo-capacitive manganese oxide. Assembled sandwich prototype on-chip supercapacitors with a symmetric configuration offer a high specific capacitance of 741.6 mF cm−2 when discharged at 1 mA cm−2, and the energy density can attain as high as 51.5 μWh cm−2. The achieved high specific energy makes such on-chip supercapacitors attractive in the field of energy collection when cooperated with micro-or nano-energy generators.en_US
dc.rightsNavngivelse 4.0 Internasjonal*
dc.titleDRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chipen_US
dc.typePeer revieweden_US
dc.typeJournal articleen_US
dc.source.journalJournal of Physics: Conference Series (JPCS)en_US

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Navngivelse 4.0 Internasjonal
Except where otherwise noted, this item's license is described as Navngivelse 4.0 Internasjonal