A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors
Chapter
Published version
![Thumbnail](/usn-xmlui/bitstream/handle/11250/2562024/SINTEF%2bS11537.pdf.jpg?sequence=5&isAllowed=y)
View/ Open
Date
2009Metadata
Show full item recordCollections
- Institutt for mikrosystemer [546]
- Publikasjoner fra CRIStin [3623]
Original version
Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS. 2009, 256-260Abstract
Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of multiple thickness. A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors