Blar i Master of Micro and Nano Systems Technology på forfatter "Bardalen, Eivind"
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Design and Fabrication of on-chip heating for Electric Substitution Radiometer
Jalalian Javadpour, Hamed (Master thesis, 2021)This thesis describes the design, simulations, and fabrication of heating resistors by the photolithography process, and finally integration of a selected resistor through a bonding procedure to the backside of a ...