Browsing Publikasjoner fra CRIStin by Author "Caminal Ros, Tomàs"
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Improved Crystallinity of Annealed 0002 AlN Films on Sapphire Substrate
Comis Bersch, Bruno; Caminal Ros, Tomàs; Tollefsen, Vegard; Johannessen, Erik Andrew; Johannessen, Agne (Peer reviewed; Journal article, 2023)AlN is a piezoelectric material used in telecommunication applications due to its high surface acoustic wave (SAW) velocity, stability, and mechanical strength. Its performance is linked to film quality, and one method to ...