dc.contributor.author | Ta, Bao Quoc | |
dc.contributor.author | Haugen, Tormod Bjørnetun | |
dc.contributor.author | Hoivik, Nils | |
dc.contributor.author | Halvorsen, Einar | |
dc.contributor.author | Aasmundtveit, Knut | |
dc.date.accessioned | 2017-12-19T14:09:38Z | |
dc.date.available | 2017-12-19T14:09:38Z | |
dc.date.created | 2013-10-24T14:46:12Z | |
dc.date.issued | 2013 | |
dc.identifier.citation | Materials. 2013, 6 (8), 3160-3170. | nb_NO |
dc.identifier.issn | 1996-1944 | |
dc.identifier.uri | http://hdl.handle.net/11250/2473024 | |
dc.description.abstract | Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy—S(T)EM. The characterization is performed directly on the microsystem, without any post-synthesis processing required. The results show an effect of temperature on the structure of CNTs: high temperature favors thin and regular structures, whereas low temperature favors “bamboo-like” structures. | nb_NO |
dc.language.iso | eng | nb_NO |
dc.relation.uri | http://www.mdpi.com/1996-1944/6/8/3160 | |
dc.rights | Navngivelse 3.0 Internasjonal | * |
dc.rights.uri | http://creativecommons.org/licenses/by/4.0/deed.no | * |
dc.title | Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure | nb_NO |
dc.type | Journal article | nb_NO |
dc.type | Peer reviewed | nb_NO |
dc.description.version | publishedVersion | nb_NO |
dc.rights.holder | © 2013 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). | nb_NO |
dc.source.pagenumber | 3160-3170 | nb_NO |
dc.source.volume | 6 | nb_NO |
dc.source.journal | Materials | nb_NO |
dc.source.issue | 8 | nb_NO |
dc.identifier.doi | 10.3390/ma6083160 | |
dc.identifier.cristin | 1060048 | |
dc.relation.project | Norges forskningsråd: 190086 | nb_NO |
cristin.unitcode | 222,58,4,0 | |
cristin.unitname | Institutt for mikrosystemer | |
cristin.ispublished | true | |
cristin.fulltext | original | |
cristin.qualitycode | 1 | |