Blar i Master of Micro and Nano Systems Technology på emneord "piezoelektrisitet"
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Design of high Q thin film bulk acoustic wave resonator for filter applications
(Master thesis, 2014)The inevitable propagation of Lamb waves in a traditional Thin Film Bulk Acoustic Wave Resonator (FBAR) leads to the lateral leakage of energy from the active region of the device, and consequently corresponds to a degradation ...