• Capacitive micromachined ultrasonic transducers 

      Forsmo, Vidar (Master thesis, 2007)
      Ultrasound technology is a powerful tool in medical diagnosis. While piezoelectric ultrasonic transducers are dominant on the marked at present, capacitive transducers cMUT- are being explored as a complementary technology. ...
    • Force/deflection measurements on micromechanical structures 

      Hals, Kai Axel (Master thesis, 2007)
      Material properties of typical MEMS materials have been widely tested. Properties of MEMS structures also depend on other factors than the material properties. A measurement system has been made to measure force/deflection ...
    • Thermoelastic influence on the performance of film bulk acoustic wave resonators 

      Strømsvold, William (Master thesis, 2009)
      Film Bulk Acoustic wave Resonators (FBAR’s) are a promising new technology for high performance resonators in the GHz-range. FBAR’s can provide higher Q-factors and higher coupling efficency than the typical high performance ...