Browsing 1 USN ansatte by Journals "Microsystems & Nanoengineering"
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Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
(Peer reviewed; Journal article, 2023)Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology ...