Browsing 1 USN ansatte by Author "Ta, Bao Quoc"
Now showing items 1-6 of 6
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Carbon Nanotubes Directly Integrated in CMOS by Local Synthesis - Towards a Wafer-Level Process
Aasmundtveit, Knut; Roy, Avisek; Ta, Bao Quoc (Chapter, 2019)Integrating nanomaterials in electronic circuitry and in microsystems is highly desired for fully exploiting the functionality of nanomaterials such as Carbon Nanotubes (CNTs), utilizing the signal processing of ... -
Design and fabrication of CMOS microstructures to locally synthesize carbon nanotubes for gas sensing
Roy, Avisek; Azadmehr, Mehdi; Ta, Bao Quoc; Häfliger, Philipp; Aasmundtveit, Knut (Peer reviewed; Journal article, 2019)Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a ... -
Direct Synthesis of Carbon Nanotubes in CMOS-Layout of Micro-heaters
Roy, Avisek; Azadmehr, Mehdi; Häfliger, Philipp; Ta, Bao Quoc; Aasmundtveit, Knut (Peer reviewed; Journal article, 2019)Direct integration of Carbon Nanotubes (CNTs) in CMOS is important for commercially manufacturing low-cost CNT-based sensors. In such compact sensors, CNTs would act as sensing element, and CMOS circuits would process ... -
Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts
Haugen, Tormod Bjørnetun; Ta, Bao Quoc; Halvorsen, Einar; Hoivik, Nils; Aasmundtveit, Knut (Journal article; Peer reviewed, 2013)Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible ... -
Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure
Ta, Bao Quoc; Haugen, Tormod Bjørnetun; Hoivik, Nils; Halvorsen, Einar; Aasmundtveit, Knut (Journal article; Peer reviewed, 2013)Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this ... -
Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
Roy, Avisek; Ta, Bao Quoc; Azadmehr, Mehdi; Aasmundtveit, Knut Eilif (Peer reviewed; Journal article, 2023)Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology ...