Blar i Applied Micro- and Nanosystems på forfatter "Nguyen, Cuong Hung"
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Interdigital-Electrode Thin-Film Piezoelectric Microactuators
Nguyen, Cuong Hung (Doctoral dissertations at the University College of Southeast Norway;29, Doctoral thesis, 2018-01)Along with microsensors, microactuators are the most important components of microelectromechanical systems. Many microactuators use piezoelectric coupling mechanisms because they allow these actuators to generate high ...