• Interdigital-Electrode Thin-Film Piezoelectric Microactuators 

      Nguyen, Cuong Hung (Doctoral dissertations at the University College of Southeast Norway;29, Doctoral thesis, 2018-01)
      Along with microsensors, microactuators are the most important components of microelectromechanical systems. Many microactuators use piezoelectric coupling mechanisms because they allow these actuators to generate high ...