Blar i USN Open Archive på tidsskrift "DTIP MEMS/MOEMS"
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A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors
(Chapter, 2009)Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of ...