Blar i USN Open Archive på forfatter "Xia, Hexin"
-
Evaluation of Silicon Diaphragms for Hermetic Packaging of Microbolometer Arrays
Xia, Hexin; Akram, Muhammad Nadeem; Bardalen, Eivind; Roy, Avisek; Aasmundtveit, Knut; Øhlckers, Per (Chapter, 2020)Hermetic packaging is a critical requirement for microbolometers to maintain long-term reliability. A thinner diaphragm is desirable for vacuum packaging of microbolometers to obtain higher infrared light transmission. ...