• Design of Silicon Cap for Hermetic Packaging of Microbolometer Focal Plane Arrays 

      Xia, Hexin; Akram, Muhammad Nadeem; Roy, Avisek; Bardalen, Eivind; Nguyen, Hoang Vu; Hoivik, Nils; Aasmundtveit, Knut Eilif; Ohlckers, Per (Peer reviewed; Journal article, 2021)
      A microbolometer array is used as a detector in an infrared camera. It converts the temperature change induced by the incoming longwave infrared light into an electrical signal for obtaining the thermal image information. ...
    • Evaluation of Silicon Diaphragms for Hermetic Packaging of Microbolometer Arrays 

      Xia, Hexin; Akram, Muhammad Nadeem; Bardalen, Eivind; Roy, Avisek; Aasmundtveit, Knut; Øhlckers, Per (Chapter, 2020)
      Hermetic packaging is a critical requirement for microbolometers to maintain long-term reliability. A thinner diaphragm is desirable for vacuum packaging of microbolometers to obtain higher infrared light transmission. ...