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dc.contributor.authorRoy, Avisek
dc.contributor.authorAasmundtveit, Knut Eilif
dc.date.accessioned2024-09-25T12:49:57Z
dc.date.available2024-09-25T12:49:57Z
dc.date.created2023-11-13T18:20:38Z
dc.date.issued2023
dc.identifier.citationRoy, A., & Aasmundtveit, K. E. (2023, 2.-5. juli). Carbon Nanotube Growth on the Polysilicon Layers of CMOS. 2023 IEEE 23rd International Conference on Nanotechnology (NANO), Jeju City, Korea.en_US
dc.identifier.issn1944-9399
dc.identifier.urihttps://hdl.handle.net/11250/3154284
dc.description.abstractDirect synthesis of CNTs in an established IC technology such as CMOS can effectively utilize CNT properties in smart sensing applications. With that vision, we designed and fabricated polysilicon microheaters in CMOS chips to grow CNTs by thermal chemical vapor deposition (CVD). CNTs were synthesized in high density on two identical Poly1 and Poly2 heaters with an effective joule heating area of 24μm x 50 μm. The applied electrical power for the heaters ranged from 1250 mW (Poly1) to 1600 mW (Poly2) during the CNT growth process. Diameter of the synthesized CNTs were mostly in the range of ~20 nm for the Poly1 substrate and ~10 nm for the Poly2 substrate. A stacked Poly1-Poly2 heater has also been used for growing CNTs with various diameters.en_US
dc.language.isoengen_US
dc.titleCarbon Nanotube Growth on the Polysilicon Layers of CMOSen_US
dc.typePeer revieweden_US
dc.typeJournal articleen_US
dc.description.versionacceptedVersionen_US
dc.rights.holder© 2023 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.en_US
dc.source.journalIEEE International Conference on Nanotechnologyen_US
dc.source.issue23en_US
dc.identifier.doihttps://doi.org/10.1109/NANO58406.2023.10231182
dc.identifier.cristin2196100
dc.relation.projectNorges forskningsråd: 245963en_US
cristin.ispublishedtrue
cristin.fulltextpostprint
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