| dc.contributor.author | Grinde, Christopher | |
| dc.contributor.author | Øhlckers, Per | |
| dc.contributor.author | Mielnik, M. | |
| dc.contributor.author | Jensen, Geir Uri | |
| dc.contributor.author | Wang, DT | |
| dc.date.accessioned | 2018-09-11T11:30:22Z | |
| dc.date.available | 2018-09-11T11:30:22Z | |
| dc.date.created | 2009-10-23T00:00:00Z | |
| dc.date.issued | 2009 | |
| dc.identifier.citation | Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS. 2009, 256-260 | nb_NO |
| dc.identifier.uri | http://hdl.handle.net/11250/2562024 | |
| dc.description.abstract | Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of multiple thickness. | nb_NO |
| dc.description.abstract | A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors | nb_NO |
| dc.language.iso | eng | nb_NO |
| dc.publisher | SINTEF | nb_NO |
| dc.relation.ispartof | Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. DTIP MEMS/MOEMS '09 | |
| dc.subject | MEMS | nb_NO |
| dc.title | A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors | nb_NO |
| dc.title.alternative | A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors | nb_NO |
| dc.type | Chapter | nb_NO |
| dc.description.version | publishedVersion | nb_NO |
| dc.source.pagenumber | 256-260 | nb_NO |
| dc.source.volume | '09 | nb_NO |
| dc.source.journal | DTIP MEMS/MOEMS | nb_NO |
| dc.identifier.cristin | 653538 | |
| cristin.unitcode | 222,60,6,0 | |
| cristin.unitcode | 222,0,0,0 | |
| cristin.unitname | Institutt for mikro- og nanosystemteknologi | |
| cristin.unitname | Høgskolen i Sørøst-Norge | |
| cristin.ispublished | true | |
| cristin.fulltext | original | |
| cristin.qualitycode | 1 | |
