Blar i Master of Micro and Nano Systems Technology på forfatter "Hanke, Ulrik"
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Improved quality factor on lamb wave resonators using a phononic crystal structure array
Hasle, Sander (Master thesis, 2023)This thesis explores the possibility of increasing the quality factor of a lamb wave resonator device with the use of a phononic crystal structure array on the surface of the bridge suspending the device. In the growing ... -
Numerical simulation of microplastics trapping in a microfluidic channel utilizing travelling acoustic waves
Farahi Bolamiri, Farshad (Master thesis, 2023)A numerical simulation based on a novel acoustofluidics model with travelling surface acoustic waves has been provided. An acoustic radiation force equation from travelling acoustic waves has been introduced to COMSOL ... -
Optimized DRIE process for different size membranes fabricated simultaneously
Tang, Jin (Master thesis, 2023)The rapid development of wireless communication systems raises the high demand for high Q factor resonators. To fabricate a high Q factor resonator, a precise membrane is important. It requires fabricating different sizes ...