Browsing Master of Micro and Nano Systems Technology by Author "Hals, Kai Axel"

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    • Force/deflection measurements on micromechanical structures 

      Hals, Kai Axel (Master thesis, 2007)
      Material properties of typical MEMS materials have been widely tested. Properties of MEMS structures also depend on other factors than the material properties. A measurement system has been made to measure force/deflection ...