Force/deflection measurements on micromechanical structures
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Material properties of typical MEMS materials have been widely tested. Properties of MEMS structures also depend on other factors than the material properties. A measurement system has been made to measure force/deflection on microstructures to examine some of the structural properties. This is done as a stylus measurement with a loadcell and a linear actuator. First the requirements for the measurement system were established, and the method decided. Then the system was characterized, and tested on micromechanical structures. The provided structures were the SW412 accelerometer structure from Infinion SensoNor Technologies, which is a simply supported mass accelerometer structure. Measurements done on this structure were thoroughly analyzed, and this analysis will also be valid for other simply supported mass accelerometer designs. This thesis include analysis of the force/deflection curve shape, the stylus placement accuracy, the spring constant along the mass, destructive tests, process variations and measurement with bridge signals.