Blar i USN Open Archive på forfatter "Müller, Lutz"
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DRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chip
Lu, Pai; Chen, Xuyuan; Øhlckers, Per; Halvorsen, Einar; Hoffmann, Martin; Müller, Lutz (Peer reviewed; Journal article, 2021)Supercapacitor is a promising solution to storage of pulsed energy generated by MEMS energy harvesting systems, relying on its faster charging/discharging capability than secondary battery. To improve the energy density ... -
Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors
Lu, Pai; Ohlckers, Per; Müller, Lutz; Leopold, Steffen; Hoffmann, Martin; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika; Chen, Xuyuan (Journal article; Peer reviewed, 2016)We demonstrate high aspect ratio silicon nanorod arrays by cyclic deep reactive ion etching (DRIE) process as a scaffold to enhance the energy density of a Si-based supercapacitor. By unique atomic layer deposition (ALD) ...