Browsing USN Open Archive by Author "Häfliger, Philipp"
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Design and fabrication of CMOS microstructures to locally synthesize carbon nanotubes for gas sensing
Roy, Avisek; Azadmehr, Mehdi; Ta, Bao Quoc; Häfliger, Philipp; Aasmundtveit, Knut (Peer reviewed; Journal article, 2019)Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a ... -
Direct Synthesis of Carbon Nanotubes in CMOS-Layout of Micro-heaters
Roy, Avisek; Azadmehr, Mehdi; Häfliger, Philipp; Ta, Bao Quoc; Aasmundtveit, Knut (Peer reviewed; Journal article, 2019)Direct integration of Carbon Nanotubes (CNTs) in CMOS is important for commercially manufacturing low-cost CNT-based sensors. In such compact sensors, CNTs would act as sensing element, and CMOS circuits would process ...