Blar i USN Open Archive på tidsskrift "Electrochemistry communications"
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Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors
(Journal article; Peer reviewed, 2016)We demonstrate high aspect ratio silicon nanorod arrays by cyclic deep reactive ion etching (DRIE) process as a scaffold to enhance the energy density of a Si-based supercapacitor. By unique atomic layer deposition (ALD) ...