• Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors 

      Lu, Pai; Ohlckers, Per; Müller, Lutz; Leopold, Steffen; Hoffmann, Martin; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika; Chen, Xuyuan (Journal article; Peer reviewed, 2016)
      We demonstrate high aspect ratio silicon nanorod arrays by cyclic deep reactive ion etching (DRIE) process as a scaffold to enhance the energy density of a Si-based supercapacitor. By unique atomic layer deposition (ALD) ...