Browsing USN Open Archive by Journals "2020 IEEE 8th Electronics System-Integration Technology Conference"
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Simulated effects of wet-etched induced surface roughness on IR transmission and reflection
(Chapter, 2020)We have constructed a finite element simulation where we investigate the effects of wet-etch-induced surface roughness on transmission and reflection of infrared light in the 8-12um band. A silicon wafer was wet-etched for ...