Blar i Master of Micro and Nano Systems Technology på emneord "Mikroteknologi"
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Capacitive micromachined ultrasonic transducers
(Master thesis, 2007)Ultrasound technology is a powerful tool in medical diagnosis. While piezoelectric ultrasonic transducers are dominant on the marked at present, capacitive transducers cMUT- are being explored as a complementary technology. ... -
Force/deflection measurements on micromechanical structures
(Master thesis, 2007)Material properties of typical MEMS materials have been widely tested. Properties of MEMS structures also depend on other factors than the material properties. A measurement system has been made to measure force/deflection ... -
Thermoelastic influence on the performance of film bulk acoustic wave resonators
(Master thesis, 2009)Film Bulk Acoustic wave Resonators (FBAR’s) are a promising new technology for high performance resonators in the GHz-range. FBAR’s can provide higher Q-factors and higher coupling efficency than the typical high performance ...